经典意义上的定影液主要用于带有 PMMA 的电子束光刻胶。这些物质的作用是在曝光的 PMMA 薄膜显影后中断显影过程，并干净地冲洗掉含有残留 PMMA 的显影液。如果不使用定影液，受污染的显影液中的聚合物残留物可能会在烘烤步骤期间沉积在表面上。
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