SX AR-N 7730/37是一款全新的化学放大(CAR)电子束光刻胶产品。这种光刻胶具有非常高的灵敏度,同时具有很高的工艺稳定性。因此可以显著提高溶液和胶层的稳定性。前段时间,我们报道了高灵敏度电子束光刻胶SX AR-N 7700/37的开发。过去的一个问题是分辨率太低,只有300 nm。现在分辨率已得到显著提高,同时保留所有其他优点。
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SX AR-N 7730/37是一款全新的化学放大(CAR)电子束光刻胶产品。这种光刻胶具有非常高的灵敏度,同时具有很高的工艺稳定性。因此可以显著提高溶液和胶层的稳定性。前段时间,我们报道了高灵敏度电子束光刻胶SX AR-N 7700/37的开发。过去的一个问题是分辨率太低,只有300 nm。现在分辨率已得到显著提高,同时保留所有其他优点。
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