对于光刻胶可实现的最佳分辨率，纯粹的学术上的分辨率值和工业上可使用的值是两个完全不同的概念。理论上，电子束胶可以实现最佳2 nm的分辨率（高斯束）。使用CSAR62 电子束光刻胶，可以在80 nm的膜厚下实现 6 nm的线条；薄膜厚度为180 nm时分辨率可高达10 nm。
点击数：9
电子束光刻胶在使用波长非常短的电子束曝光设备，可以获得高达 2 nm 的优异分辨率（高斯束）。电子束曝光通常是使用基于高斯束直写或变形束工作原理的传统电子束光刻设备来进行的。
对于AR-N/P 7000 光刻胶产品线，通常也可用于混合光刻工艺，即可以在相应的紫外光谱工作范围内使用 i-、g-线步进投影式光刻机或者接触式曝光机进行额外的曝光。
点击数：70
自1992年以来，我们以适中的价格为客户提供高质量的产品。得益于高效的研究部门和我们对客户需求的密切沟通，我们可以快速响应市场需求并持续提供创新性的产品。
中国区独家代理-
北京汇德信科技有限公司
海淀区西三旗建材城中路12号1幢118
中国 北京（100096）
电话：+86 10 8286 7920
传真：+86 10 8286 7919
电子邮件：info@allresist.cn
©1999-2022-Allresist CN-一般条款和条件-数据隐私
点击数：0
This is a notification that can be used for cookie consent or other important news. It also got a modal window now! Click "learn more" to see it!
OKLearn More更多信息We may request cookies to be set on your device. We use cookies to let us know when you visit our websites, how you interact with us, to enrich your user experience, and to customize your relationship with our website.
Click on the different category headings to find out more. You can also change some of your preferences. Note that blocking some types of cookies may impact your experience on our websites and the services we are able to offer.
These cookies are strictly necessary to provide you with services available through our website and to use some of its features.
Because these cookies are strictly necessary to deliver the website, refuseing them will have impact how our site functions. You always can block or delete cookies by changing your browser settings and force blocking all cookies on this website. But this will always prompt you to accept/refuse cookies when revisiting our site.
We fully respect if you want to refuse cookies but to avoid asking you again and again kindly allow us to store a cookie for that. You are free to opt out any time or opt in for other cookies to get a better experience. If you refuse cookies we will remove all set cookies in our domain.
We provide you with a list of stored cookies on your computer in our domain so you can check what we stored. Due to security reasons we are not able to show or modify cookies from other domains. You can check these in your browser security settings.
We also use different external services like Google Webfonts, Google Maps, and external Video providers. Since these providers may collect personal data like your IP address we allow you to block them here. Please be aware that this might heavily reduce the functionality and appearance of our site. Changes will take effect once you reload the page.
Google Webfont Settings:
Google Map Settings:
Google reCaptcha Settings:
Vimeo and Youtube video embeds:
You can read about our cookies and privacy settings in detail on our Privacy Policy Page.
隐私政策