对于光刻胶可实现的最佳分辨率，纯粹的学术上的分辨率值和工业上可使用的值是两个完全不同的概念。理论上，电子束胶可以实现最佳2 nm的分辨率（高斯束）。使用CSAR62 电子束光刻胶，可以在80 nm的膜厚下实现 6 nm的线条；薄膜厚度为180 nm时分辨率可高达10 nm。
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电子束光刻胶在使用波长非常短的电子束曝光设备，可以获得高达 2 nm 的优异分辨率（高斯束）。电子束曝光通常是使用基于高斯束直写或变形束工作原理的传统电子束光刻设备来进行的。
对于AR-N/P 7000 光刻胶产品线，通常也可用于混合光刻工艺，即可以在相应的紫外光谱工作范围内使用 i-、g-线步进投影式光刻机或者接触式曝光机进行额外的曝光。
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