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衬底和光刻胶之间的附着力对于后续光刻工艺至关重要。清洁工艺或技术本身的极小的变化都会对粘附强度产生重大影响。硅、氮化硅和贱金属(铝、铜)通常具有良好的光刻胶粘附性能,而在 SiO 2上的粘附力会降低、玻璃、贵金属如金和银或砷化镓。对于这些衬底,必须进行增附处理来提高粘附强度。过高的空气湿度 (> 60 %) 也会显着降低附着力。如果使用新的清洁基板(晶圆),在大约 200 °C 分钟(3 分钟,热板)下烘烤则可以有效干燥样品表面,但之后应快速处理衬底。强烈建议在干燥器中临时储存,以防止再次吸附水汽。
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衬底和光刻胶之间的粘附性是紫外光刻胶的一个敏感特征,电子束光刻胶也是如此。相比于与 AR-N/P 7000 产品线来说,电子束光刻胶PMMA、聚合物和苯乙烯丙烯酸酯光刻胶明显不太容易出现粘附差的问题。而电子束胶AR-N/P 7000 产品线在衬底清洗过程或其他参数的很小的变化可能会让光刻胶和衬底的粘附强度产生致命影响。
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自1992年以来,我们以适中的价格为客户提供高质量的产品。得益于高效的研究部门和我们对客户需求的密切沟通,我们可以快速响应市场需求并持续提供创新性的产品。
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中国 北京(100096)
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