水溶性碱显影液由于会从空气中吸收 CO 2从而导致老化失效。在这方面，缓冲水碱性显影液（AR 300-26、-35）比含有 TMAH 的 AR 300-40 系列显影液更稳定。在这个系列中，TMAH 浓度的显影液最为敏感。
光刻胶是光敏性的，它们的性质会在光照或高温下发生变化。它会在储存过程中发生老化，因此光刻胶必须装在避光的棕色玻璃瓶中，冷藏储存，其处理过程也只能在黄光（λ > 500 nm）下进行。产品的有效期和建议的储存温度均在各自的产品标签上注明。如果保持在这些温度下，未开封的光刻胶会在质保期内（通常是生产后 2 年，视产品而定）是稳定的，且至少在销售日期后 6 个月不会产生质量问题。
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