在显影过程中,正胶是通过去除曝光区域的光刻胶来获得结构,而如果使用负胶,则去除未曝光区域。为了获得可重复的结果, 强烈建议温度在 21 和 23 °C 0.5 °C 之间进行。
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在显影过程中,正胶是通过去除曝光区域的光刻胶来获得结构,而如果使用负胶,则去除未曝光区域。为了获得可重复的结果, 强烈建议温度在 21 和 23 °C 0.5 °C 之间进行。
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在显影过程中,正胶的胶膜的曝光区域将被去除从而实现图形化。而负胶,未曝光区域被去除从而实现图形化。为了实现可重复的结果,强烈推荐对有机溶剂显影液(AR 600-50,-50,-56) 显影过程的温度应为21-23℃±0.5℃,对水溶性碱显影剂(AR 300-26, -35, -40)显影过程的温度应为21-23℃±0.5℃。显影液AR 600-50:一种溶剂型显影液,专为聚合物电子束胶 (AR-P 617) 设计。使用该显影液,可提高电子束光刻胶的灵敏度。
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