在显影过程中，正胶是通过去除曝光区域的光刻胶来获得结构，而如果使用负胶，则去除未曝光区域。为了获得可重复的结果， 强烈建议温度在 21 和 23 °C 0.5 °C 之间进行。
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在显影过程中，正胶的胶膜的曝光区域将被去除从而实现图形化。而负胶，未曝光区域被去除从而实现图形化。为了实现可重复的结果，强烈推荐对有机溶剂显影液（AR 600-50，-50，-56） 显影过程的温度应为21-23℃±0.5℃，对水溶性碱显影剂（AR 300-26， -35, -40）显影过程的温度应为21-23℃±0.5℃。显影液AR 600-50：一种溶剂型显影液，专为聚合物电子束胶 (AR-P 617) 设计。使用该显影液，可提高电子束光刻胶的灵敏度。
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